发明名称 |
Crystallization apparatus and method, manufacturing method of electronic device, electronic device, and optical modulation element |
摘要 |
A manufacturing method of an electronic device includes positioning a processed substrate with respect to a substrate stage of a crystallization apparatus and supporting it with at least one positioning mark previously provided on the processed substrate being used as a references, applying a modulated light beam to a predetermined area of the processed substrate supported by the substrate stage and crystallizing the area, and forming at least one circuit element in the crystallized area of the processed substrate subjected to positioning with the positioning mark being used as a reference.
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申请公布号 |
US2005153552(A1) |
申请公布日期 |
2005.07.14 |
申请号 |
US20040006732 |
申请日期 |
2004.12.08 |
申请人 |
AKITA NORITAKA;TAKAMI YOSHIO |
发明人 |
AKITA NORITAKA;TAKAMI YOSHIO |
分类号 |
G03F7/20;B23K26/04;B23K26/06;B23K26/08;G02F1/13;H01L21/00;H01L21/027;H01L21/20;H01L21/268;H01L21/302;H01L21/336;H01L21/461;H01L29/786;(IPC1-7):H01L21/302 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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