ELECTRON BEAM DEVICE AND SAMPLE HOLDER FOR ELECTRON BEAM DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an electron microscope of which, the problem of deterioration of vacuum in a mirror body caused by gas, and drift of sample resulting from the elongation of a heater by heating, which occurs in real-time observation of a reaction process of the sample with the gas in heating are solved, capable of observing with high resolution. SOLUTION: The deterioration of vacuum is confined within a shortest time by arranging a gas exhaust means in opposition to a gas supplying means for a sample. A heater with the sample attached thereto is disposed inside a gas introductory pipe to restrain the gas from flowing into the mirror body. A tension adjustment means of the heater is disposed at a sample holder for an electron beam device or the device as risk reduction measures for the elongation of the heater. COPYRIGHT: (C)2005,JPO&NCIPI