| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for monitoring the advance state of a washing state in a real time at the time of washing equipment. SOLUTION: Piping 15 through which a washing solution used in the washing of equipment flows and the electrodes 21-23 of the electrochemical sensor arranged to the piping 15 so as to come into contact with the washing solution are provided. The electrochemical sensor is a device for measuring an electrochemical current noise and electrochemical potential noise, and is equipped with a washing state monitoring section to monitor the washing advance of the equipment by measuring the electrochemical current noise and the electrochemical potential noise. COPYRIGHT: (C)2005,JPO&NCIPI
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