| 摘要 |
PROBLEM TO BE SOLVED: To provide a hard film having excellent lubricity under water environment and excellent wear resistance. SOLUTION: (1) The hard film contains Cr(C<SB>1-d</SB>N<SB>d</SB>), and satisfies the expressions 0.5≤d≤1. In the hard film having excellent water lubricity, the diffraction line intensity I(111), I(200) and I(220) of the planes (111), (200) and (220) to be detected by the X-ray diffraction of theθ-2θmethod satisfies the expression (1) I(111)/I(220)≤1, and/or expression (2) I(200)/I(220)≤1. (2) The hard film contains oxygen 0.01-0.2 by atom. COPYRIGHT: (C)2005,JPO&NCIPI
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