| 摘要 |
PROBLEM TO BE SOLVED: To provide a method capable of manufacturing a DNA microarray, by rapidly processing a substrate, comprising an inexpensive material and capable of easily forming the same, even when a plurality of detection parts are formed. SOLUTION: A lead part 4 and a detection part 3 are formed in series on a substrate 2, having insulation properties by a material, based on carbon and at least the detection part 3 is subjected subsequently to plasma irradiation, before nucleic acid is bonded to the detection part 3. By this constitution, the DNA microarray can be manufactured, by applying rapid processing to the substrate comprising the inexpensive material and can be easily formed, even when a plurality of detection parts are formed. COPYRIGHT: (C)2005,JPO&NCIPI
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