METHOD FOR CUTTING SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a cutting method capable of reducing the breaking occurring at the machining end part while suppressing a grinding wheel abrasion amount during cutting when a substrate made of an aluminum nitride sintered body is cut with a cutting grinding wheel. SOLUTION: When the substrate made of the aluminum nitride sintered body is cut by a rotating grinding wheel, the substrate is cut by the rotating grinding wheel using diamond abrasive grains having an average grain size (X;μm) satisfying the range expressed by formula (1): 2d≤x≤150/d to the average crystal grain size (d;μm) of the aluminum nitride sintered body. COPYRIGHT: (C)2005,JPO&NCIPI