| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical multilayer film in which each layer can be homogenized and to provide a method for producing the film. SOLUTION: In the method for producing an optical multilayer film having spacer layers 30 and mirror layers 20 alternately deposited on the surface of a substrate 10, layers having predetermined thickness or larger of the spacer layers 30 are deposited in a plurality of times of film depositing steps. COPYRIGHT: (C)2005,JPO&NCIPI
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