RING-OPENING METATHESIS COPOLYMER HYDROGENATED PRODUCT AND METHOD FOR PRODUCING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a polymer having good film-forming properties and capable of being easily utilized as a semiconductor fine processing photoresist film.

SOLUTION: This ring-opening metathesis copolymer hydrogenated product comprises at least structural units expressed by general formula [3] [R8to R11are each H or a 1-10C alkyl; X2is -O- or -CR122- (R12is H or a 1-10C alkyl); and m is 0 or an integer of 1 to 3] and/or general formula [4] [R13to R16are each H or a 1-10C alkyl; X3is -O- or -CR122-; one of Y1and Y2is -(C=O)- and the other is -CR182- (R18is H or a 1-10C alkyl); and n is 0 or an integer of 1 to 3] and has a ratio (Mw/Mn) of a weight-average molecular weight (Mw) to a number-average molecular weight (Mn) of more than 2.0 and less than 5.0.

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