| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method and apparatus where hydrogen peroxide in a hydrogen peroxide-containing copper etching waste solution is efficiently decomposed to a low concentration, and copper with high purity is more efficiently recovered from the copper waste solution. <P>SOLUTION: The method comprises: a first stage wherein hydrogen peroxide is decomposed by electrolysis: and a second stage wherein electrolyzing voltage is increased to precipitate copper by electrolysis. As the apparatus used for the method, the one equipped with: a first electrolyzer provided with a first electrolytic cell 1 using platinum or a platinum-containing composite as an anode and a first storage cell 3 connected to the first electrolytic cell by circulation piping and decomposing hydrogen peroxide by non-electrochemical reaction; and a second electrolyzer provided with a second electrolytic cell 2 electrolyzing a copper etching waste solution in which the hydrogen peroxide is decomposed and a second storage cell 4 connected to the second electrolytic cell by circulation piping and depositing copper; and connection piping 11 feeding the copper etching waste solution in which the hydrogen peroxide is decomposed in the first electrolyzer to the second electrolyzer is preferable. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
