| 摘要 |
PROBLEM TO BE SOLVED: To uniformly carry out a predetermined treatment over a whole substrate by uniformly and rapidly coating the pre-treated surface of the substrate with a treating liquid and prevent the substrate from damaging. SOLUTION: The pre-treated surface of the substrate 2 is coated with a developing liquid 11 while a developing liquid coating nozzle 9 is moved from the starting position of coating in the opposite direction to the conveying direction of the substrate 2. After the substrate 2 is coated with the developing liquid 11, the coating nozzle 2 moves to the starting position of coating at a speed higher than the conveying speed of the substrate 2, thereby enabling the coating of a next substrate to be coated with the developing liquid 11. COPYRIGHT: (C)2005,JPO&NCIPI |
