| 摘要 |
PROBLEM TO BE SOLVED: To provide an ultrasonic concentration measuring transmitter, superior in temperature responsiveness and capable of accurately measuring the concentration of a solution containing a powder of abrasive, such as a high corrosive semiconductor polishing solution. SOLUTION: A cell 15 is provided with an enlarged diameter part 11a, sequentially enlarged inside in the shape slopes 11b and 11c. An ultrasonic-transmitting and receiving part 12 for transmitting ultrasonic waves to the solution L to be measured; a reflecting plate 13 placed opposite to the ultrasonic-transmitting and receiving part 12 via the solution L to be measured for reflecting ultrasonic waves, transmitted from the ultrasonic-transmitting and receiving part 12 toward the ultrasonic-transmitting and receiving part 12; the ultrasonic-transmitting and receiving part 12 for measuring the propagation time of transmitted ultrasonic waves; and a temperature sensor 17 for measuring the temperature of the solution L to be measured. The ultrasonic-transmitting and receiving part 12 is inserted in the cell 15 through an upper part of the cell 15 and fixed to a case 16 with bolts 22a and 22b. COPYRIGHT: (C)2005,JPO&NCIPI
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