| 摘要 |
PROBLEM TO BE SOLVED: To provide a frequency adjustment method for preventing ion beams from being emitted to a trimming undesirable part, so as to prevent readhesion of scattered substance from an electrode to a piezoelectric resonator. SOLUTION: In a piezoelectric component formed by fixing the piezoelectric resonator 10 above an upper side of a base substrate 1, an opening 44a of a first mask 44 is fitted to an outer circumferential part of the piezoelectric resonator 10 so that the upper side of the first mask 44 has a height nearly the same as or lower than the height of the surface of the piezoelectric resonator 10, a second mask 45 is located above the first mask 44 by a prescribed space 46, and ion beams are emitted from above the second mask 45 to trim the electrode of the piezoelectric resonator. Since the first mask 44 shields diverged ion beams, the ion beams do not trim the electrode of the base substrate 1 located below the piezoelectric resonator 10. Since the scattered substance from the electrode of the piezoelectric resonator 10 trimmed by the ion beams is scattered in the space 46, no readhesion of the scattered substance is caused to the piezoelectric resonator. COPYRIGHT: (C)2005,JPO&NCIPI
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