METHOD FOR PATTERNING A FERROELECTRIC POLYMER LAYER
摘要
<p>Ferroelectric polymers such as for example copolymers of vinylidenedifluoride (VDF) and trifluoroethylene (TrFE) may be patterned by spincoating the ferroelectric polymer layer from a ferroelectric spincoating solution, which comprises a photosensitive crosslinker, onto a substrate followed by irradiating the ferroelectric polymer layer through a mask and removing the unexposed parts of the ferroelectric polymer layer.</p>
申请公布号
WO2005064653(A1)
申请公布日期
2005.07.14
申请号
WO2004IB52688
申请日期
2004.12.07
申请人
KONINKLIJKE PHILIPS ELECTRONICS N.V.;MARSMAN, ALBERT, W.;WILLARD, NICOLAAS, P.