ELECTRICITY REMOVAL METHOD AND DEVICE, MANUFACTURING METHOD OF ELECTRO-OPTICAL DEVICE, AND DROPLET DISCHARGE DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an electricity removal method and an electricity removal device for preventing discharge when taking up a substrate from a stage. SOLUTION: When removing a substrate which is positioned on the stage and of which the face contacting with the stage is almost a square, ionized light is irradiated in a direction almost diagonal to the face of the substrate. When removing the substrate which is positioned on the stage and of which the face contacting with the stage is almost the square, ionized air is sprayed in a direction almost diagonal to the face of the substrate. COPYRIGHT: (C)2005,JPO&NCIPI