| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing single crystals, by which a plurality of single crystals, each having a respectively desired crystal quality, can be manufactured without changing structures in a chamber of a single crystal production apparatus when the plurality of single crystals are grown in the production of the single crystals by a CZ method. SOLUTION: In the method for manufacturing at least two or more single crystals by pulling the single crystals from a raw material melt in a chamber by the CZ method, when at least two or more single crystals are grown, at least two or more single crystals, each having a respectively desired crystal quality, are manufactured by regulating the distance between the surface of the raw material melt and a heat shielding member arranged opposite to the surface of the raw material melt in the chamber to a value at which the quality of a relevant single crystal becomes within a target crystal standard, every time when the growth of each single crystal is started, then adjusting crystal temperature gradient G, and controlling the pulling speed V to a value at which the quality of a relevant single crystal becomes within a target crystal standard, depending on the growth of respective single crystals. COPYRIGHT: (C)2005,JPO&NCIPI
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