发明名称 METHOD FOR MANUFACTURING ELECTRONIC ELEMENT
摘要 PROBLEM TO BE SOLVED: To provide a method for manufacturing an electronic element which can employ such a method with a low cost and a high material use efficiency as a printing method, can form a simple, convenient and fine pattern, and have a high value-adding function in addition to the pattern formation. SOLUTION: A plurality of sheets of platens 3A, 3B having nearly the same pattern are placed on a substrate 1 to be tightly contacted thereon, a coating solution is applied on the substrate, and then the substrate is subjected to patterning. Thus, even when the coating solution is low in its viscosity, extra coating solution is escaped into a gap between the templates 3A, 3B. Consequently, the coating solution can be reliably prevented from flowing into an interface between the substrate 1 and the template 3A, and a film as thin as about 1μm or smaller can be formed at a high accuracy in a short time and in a simple process. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005191416(A) 申请公布日期 2005.07.14
申请号 JP20030433196 申请日期 2003.12.26
申请人 RICOH CO LTD 发明人 KONDO HIROSHI;KONDO HITOSHI;TANO TAKANORI;TOMONO HIDENORI
分类号 B05D1/32;B05D7/00;H01L21/312;H01L21/368;(IPC1-7):H01L21/312 主分类号 B05D1/32
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