| 摘要 |
PROBLEM TO BE SOLVED: To provide a two-dimensional optical deflector which is independently driven around two axes. SOLUTION: A movable plate unit arranged in a magnetic field has an inner movable plate 112, an outer movable plate 116, two inner torsion bars 114a and 114b, a support 120, and two outer torsion bars 118a and 118b. Further, the movable plate unit 110 has two inner wirings 130a and 130b that extend along the inner movable plate 112. The first inner wiring 130a has a first inner drive wiring portion 132a and two first inner extracted wiring portions 134a and 136a, and the second inner wiring 130b has a second inner wiring portion 132b and two second inner extracted wiring portions 134b and 136b. The two first inner extracted wiring portions 134a and 136a are located substantially line-symmetrically with respect to a second axis A2 and the two second inner extracted wiring portions 134b and 136b are located substantially line-symmetrically with respect to the second axis A2. COPYRIGHT: (C)2005,JPO&NCIPI
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