| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing an optical unit such as a mirror, in particular, having an optical element deviating from a circular shape and to provide an optical unit manufactured by the method. SOLUTION: In the method for manufacturing an optical unit (7) having an optical element (13) deviating from a circular shape for an optical imaging system (1), in particular, for a projection objective system in semiconductor lithography in an extreme ultraviolet (EUV) region, a supporting part (8) is provided which is then provided with reference surfaces (10, 14, 15) for adjustment in the optical system (1), and the optical element (13) is connected to the supporting part (8) in accordance with these reference surfaces. Subsequently, a zero point (17) is fixed with respect to the optical element (13) and the zero point forms a reference point with respect to a zero point (18) fixed in the optical system (1) during the period of the installation of the optical unit (7) in the optical system (1). COPYRIGHT: (C)2005,JPO&NCIPI |
