| 摘要 |
PROBLEM TO BE SOLVED: To improve precision of smoothing, while reducing the calculation load in the smoothing processing of two-dimensional array data. SOLUTION: This TFT array inspection device, for inspecting a TFT array by irradiating a TFT substrate with an electron beam and detecting secondary electrons generated from pixels of the TFT substrate by the electron beam irradiation, comprises a data processing means extracting low-frequency component information from two-dimensional array data obtained by scanning an area of an inspection object with the secondary electrons, and determining defect information of the TFT substrate by use of the extracted low-frequency component information. The data processing means performs a sampling processing for selecting a predetermined number of data with a spatial array determined from the two-dimensional array data based on a predetermined rule with a mask, and a low-pass filter processing for extracting the low-frequency component information by use of the data selected by the sampling processing to the area of the inspection object, while successively shifting the mask. COPYRIGHT: (C)2005,JPO&NCIPI
|
