| 摘要 |
PROBLEM TO BE SOLVED: To securely conduct desired indirect heating process about an object to be processed while maintaining safety and stability of a processing system and prevent gas elements from being discharged outdoor. SOLUTION: At the time of normal operation of the processing system, in the case that any defect about parts other than base mechanisms (an indirect heating means 2, a heat generation means 3, a gas element combustion means 4) is detected, operation of the base mechanism is continued and operation of respective means of its supplementary mechanisms is suspended and terminated. In addition, when only the base mechanisms are operated as described above, normal rotation and reverse rotation are alternatively conducted by a normal/reverse rotation control means 53, about an indirect heating furnace within a range where the object to be processed is not discharged from inside of the indirect heating furnace (rotation furnace) of the indirect heating means 2. COPYRIGHT: (C)2005,JPO&NCIPI
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