| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical element assembling body for electron beam apparatus which can realize, in a simplified structure, high-level positioning accuracy of a plurality of optical elements used in an electro-optical system. SOLUTION: The optical element assembling body 1 comprises a plurality of optical elements 2 and a cylindrical body 3 for accommodating optical elements 2 and is constituted for enabling assembling into an electron beam apparatus. In this optical element assembling body, a plurality of through-holes 4 are formed to the side surface of the cylindrical body 3. Moreover, the optical elements 2 are fixed, in the contact state, to the internal circumferential surface 3a of the cylindrical body 3 provided opposed to the through-holes 4. COPYRIGHT: (C)2005,JPO&NCIPI
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