| 摘要 |
PROBLEM TO BE SOLVED: To provide a polishing device for stabilizing the flow of a polishing agent or gas injected from an injection nozzle. SOLUTION: This polishing device for polishing the surface of a polished object by the flow of a polishing agent is provided with a vibration generating means for vibrating a jet orifice 1a of an injection nozzle 1 for injecting a fluid. COPYRIGHT: (C)2005,JPO&NCIPI
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