CLEANING APPARATUS AND APPARATUS FOR EVALUATING CLEANLINESS BY USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a cleaning apparatus with which even a small precision component having an irregular shape can be cleaned without leaving a stain behind, and to provide a cleanliness evaluating apparatus with which accurate cleanliness can be evaluated by using the cleaning apparatus. SOLUTION: The cleaning apparatus is provided with: a liquid storage tank 1 which has a supply port 1a of a cleaning liquid or a rinsing liquid and is connected to a compressed air supplying source 10; and a cleaning chamber 13 connected to the liquid storage tank 1 while interposing a stop valve 8 between them. The cleaning chamber 13 has a spouting port 15 formed at the bottom and a bottom surface supporting part 16 for supporting the bottom surface of an object to be cleaned in such a state that at least a part of the object to be cleaned is housed in the spouting port 15. COPYRIGHT: (C)2005,JPO&NCIPI