发明名称 Method of covering clear aperture of optic during deposition of glue protection layer
摘要 A system and method that can be used to cover a portion (e.g., a clear aperture) of an optical element (e.g., a lens) during coating of another portion (e.g., a circumferential portion) of the optical element. This can be done to protect the clear aperture during coating of an adhesive protection layer proximate a circumferential edge of the lens without damaging or altering the clear aperture. The method can include the following steps. An optical element is held so that a first portion of the optical element is covered and a second portion of the optical element is exposed. A first coating is provided on the second portion of the optical element. The optical element is released from being held. A second coating is provided on the optical element. The first and second coatings are removed from the second portion of the optical element.
申请公布号 US2005153064(A1) 申请公布日期 2005.07.14
申请号 US20040756352 申请日期 2004.01.14
申请人 ASML HOLDING N.V. 发明人 LIPSON MATTHEW
分类号 H01L21/027;B05D1/32;B05D5/06;(IPC1-7):B05D5/06 主分类号 H01L21/027
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