METHOD FOR PRODUCING AN INTEGRATED FABRY-PEROT MICROCAVITY DEVICE WITH SILICON TECHNOLOGY

摘要

The method makes it possible to produce a Fabry-Perot microcavity device (30), and comprises the operations of providing at least one substrate (10) of dielectric MOS­-compatible material, such a quartz or silicon, producing, using MOS-compatible materials and techniques, an opposing and parallel pair of multilayer reflective structures of the dielectric Bragg reflector type (11, 21, 111), at a predetermined distance from one another, between which a microcavity (30) is defined, and filling the microcavity (30) with a material, such as a liquid crystal, having predetermined optical refraction characteristics.