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经营范围
发明名称
Lithographischer Projektionsapparat
摘要
申请公布号
DE60020638(D1)
申请公布日期
2005.07.14
申请号
DE20006020638
申请日期
2000.04.14
申请人
ASML NETHERLANDS B.V., VELDHOVEN
发明人
SEGERS, HUBERT MARIE;BOON, RUDOLF MARIA;BIJNAGTE, ANTON ADRIAAN;JACOBS, FRANCISCUS MATHIJS
分类号
G03F1/14;G03F7/20;H01L21/027;H01L21/68;(IPC1-7):G03F7/20
主分类号
G03F1/14
代理机构
代理人
主权项
地址
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