| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor processing device, such as a semiconductor inspecting device, a semiconductor machining device or the like, with their processing efficiency being easily enhanced through the speeding up of a rotating table. SOLUTION: The semiconductor processing device 10 comprises a lower table 20 and an upper table 30. A stage 24 for mounting a device 8 is provided on the lower table 20 and rotated intermittently. The upper table 30 is arranged on approximately the same shaft as that of the lower table 20, and is continuously rotated so that its number of revolution matches approximately the same as that of the rotating table 20. COPYRIGHT: (C)2005,JPO&NCIPI |
