| 摘要 |
PROBLEM TO BE SOLVED: To provide a dicing device and a dicing method capable of suppressing an error of a cut-in level as small as possible. SOLUTION: The dicing device includes a surface position detecting means 46 for detecting the surface position of a dicing tape 32, and a cut-in control means 50 for controlling a cut-in levelΔt into the dicing tape 32 by a blade 22 on the basis of the surface position of the dicing tape 32 detected by the surface position detecting means 46. Therefore, the cut-in levelΔt into the dicing tape 32 can be controlled on the basis of the surface position irrespective of variations of the thickness of the dicing tape 32. COPYRIGHT: (C)2005,JPO&NCIPI |
