ABNORMALITY DETECTION METHOD FOR CONICAL OR TRUNCATED CONICAL BUMP, AND ABNORMALITY DETECTOR FOR THE CONICAL OR TRUNCATED CONICAL BUMP

摘要

PROBLEM TO BE SOLVED: To precisely perform a bump abnormality detection in an abnormality detection method and detector for conical or truncated conical bump for detecting whether a conical or truncated conical bump has an abnormality. SOLUTION: In the bump abnormality detection method for an insulating plate including the conical or truncated conical bump, the tip of which is protruded through it; an inspection object having the insulating plate is placed on a mount base with the surface of the insulating plate with the protruded tip of the bump is protruded upward; and an inspection area is set in this surface of the insulating plate. An illumination light source is set at a position with an elevation of 30°or smaller from the inspection area, and the inspection area is illuminated by the illumination light source. A camera is set substantially directly above the inspection area, the inspection area is imaged by the camera, and image processing is performed for the imaged inspection area. COPYRIGHT: (C)2005,JPO&NCIPI