| 摘要 |
PROBLEM TO BE SOLVED: To provide a multipurpose inspection system using a special illumination method, capable of observing, analyzing and inspecting minute changes in samples which are too transparent/reflective for light to carry out observations by using usual optical systems. SOLUTION: A high-intensity light beam 37 emitted from a light source 13b is brought to enter a point source section 14 and pass through a pinhole (various ones) 14b, thereby forming a point source 38. Then, a light beam A39 from the point source 38 is received by a plane mirror a15 and passes through a partially transmitting mirror B (half mirror B) 19, and a collimator lens (convex lens) 17 is disposed at its focal distance position, thereby converting the light beam A39 into parallel light beams A46. Furthermore, a plane mirror A18 containing a sample stage 10a is disposed at a position distant from the collimator lens 17 so as to carry out retro-reflections in parallel. Then, the parallel light beam A46 is reflected by the plane mirror A18 and converted into a light beam B40, and the collimator lens 17 converges it to form a light beam D44, and the light beam D44 is brought to enter a CCD camera A (digital type/analog type) 28. Thus, a video signal A32 is input to a personal computer 34, converted into image data A32a and displayed on a CRT monitor 36 as image data enabling the minute changes which are hardly checked by the naked eye, to be acquired. Therefore, reflection/transmission observations for the samples are simply carried out by using reflection type/transmission type schlieren illumination methods (shadowgraph illumination methods), and its special illumination optical apparatus can be made compact and realized at a low cost. COPYRIGHT: (C)2005,JPO&NCIPI
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