| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe-driving mechanism which can realize to fasten the speed of inspection at the time of contact inspection of the probe, in addition to enforcing of position accuracy, without generating vibration during probing. SOLUTION: In context of the prove-driving mechanism composed of a crank arm 14 with its one edge 14a fixed to a rotating output shaft 13a of the motor 13 of mobile body 11 moving in X-Y directions, a coupling arm 15 coupling its one edge 15a with another edge 14b of the crank arm 14, and a probe holder 16 connected with another edge 15b of the coupling arm 15 to allow for free movement in advancing or retreating, the crank arm 14 is fixed to the rotating output shaft 13a setting perpendicularly to the moving direction of the prove holder 16 when the rotating output shaft 13a is present at its starting point of rotation, while the prove holder 16 has position relation of nearly parallel with the coupling arm 15 and is made to assume a configuration to contact its holding probe 17 with the inspection point of a test circuit substrate P. COPYRIGHT: (C)2005,JPO&NCIPI
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