DEFECT INSPECTION DEVICE AND DEFECT INSPECTION METHOD

摘要

A defect inspection device able to positively reduce a noise light from a base layer and carry out a good defect inspection; and a defect inspection method. The device comprises a lighting device (13) for applying a lighting light to a substrate (11) under inspection having a resist layer formed at the upper layer thereof with cyclic patterns, and an imaging optical system (14) for forming the image of the substrate under inspection based on a light emitted from the substrate by the irradiation of the lighting light. The wavelength of the lighting light is set so that the intensity of a light from the surface of the resist layer, out of lights emitted from the substrate, is larger than that of a light gone through the surface of a cyclic pattern layer formed below the resist layer.