| 摘要 |
PROBLEM TO BE SOLVED: To provide a focus detecting device and a tilt adjustment system that are faster or tolerant of vibration and disturbance during adjustment, or at a lower cost. SOLUTION: The focus detecting device is provided with a linear light energy distribution detection part 4 and a focus state judgement part 5. The distribution detection part 4 detects at least one linear light energy distribution of the whole image at an arbitrary position in a prescribed region on a reference surface 1 from a two-dimensional light energy distribution of an image on the reference surface 1. The focus state judgement part 5 judges the focus state of the image on the reference surface 1 on the basis of the detected linear light energy distribution. COPYRIGHT: (C)2005,JPO&NCIPI |
