| 发明名称 |
Metallic thin film piezoresistive transduction in micromechanical and nanomechanical devices and its application in self-sensing SPM probes |
| 摘要 |
Thin metallic films are used as the piezoresistive self-sensing element in microelectromechanical and nanoelectromechanical systems. The specific application to AFM probes is demonstrated.
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| 申请公布号 |
US2005150280(A1) |
申请公布日期 |
2005.07.14 |
| 申请号 |
US20040010578 |
申请日期 |
2004.12.14 |
| 申请人 |
CALIFORNIA INSTITUTE OF TECHNOLOGY |
发明人 |
TANG HONGXING;LI MO;ROUKES MICHAEL L. |
| 分类号 |
G01L1/18;G01L1/20;(IPC1-7):G01B5/28 |
主分类号 |
G01L1/18 |
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