Electrostatic chuck and manufacturing method for the same, and alumina sintered member and manufacturing method for the same

摘要

An electrostatic chuck comprises a dielectric ceramic layer made of an alumina sintered body having a volume resistivity equal to or greater than about 1x10¹⁷Omega.cm at room temperature and a volume resistivity equal to or greater than about 1x10¹⁴Omega.cm at 300° C., and an electrode formed on one surface of the dielectric ceramic layer.