| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem that processes become complicated in a method for coating a seizure resistant film on a ceramic hard film as a method for preventing a material to be ground from being deposited to an exposed tool as a result of the breaking of a film due to oxidization of the film caused by heat generation during machining when dry machining is executed by using a tool with a conventional ceramic film. SOLUTION: A CrSiN hard film with a microstructure excellent in abrasion resistance and oxidization resistance, in which microcrystals of CrN and an amorphous part of SiN are mixed in a nano-meter order, is formed on the tool for dry machining processes. Consequently, the service lifetime of the tool for dry machining can be improved by improving abrasion resistance and seizure resistance. COPYRIGHT: (C)2005,JPO&NCIPI
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