| 摘要 |
A laser machining system includes a laser oscillator ( 1 ) for outputting a laser beam, a light guide ( 2 ) through which the laser beam passes, a circulation guide ( 8 ) connected to the light guide ( 2 ), a filter ( 7 ) serving as a gas recycling means, and a fan ( 6 ) serving as a light guide blower means. The gas in the light guide ( 2 ) is sucked into the circulation guide ( 8 ) by the blower fan ( 6 ), so that molecules energized highly by being irradiated with the laser beam strike a filter material of the filter ( 7 ) provided in the circulation guide ( 8 ), thereby to restore the gas molecules to the ground state before irradiation and recycle it. The recycled gas is returned to the light guide ( 2 ). As gas molecules absorbing the energy of the laser beam and becoming large in effect of scattering of the laser beam is removed from the light guide ( 2 ), dispersion of the laser beam ( 3 ) can be suppressed and stable laser machining performance can be obtained.
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