| 摘要 |
PROBLEM TO BE SOLVED: To prevent occurrence of splash when depositing an MgO film, and to eliminate change in MgO film deposition rate with the lapse of time. SOLUTION: A MgO vapor-deposited material 11 has a porous structure with the porosity of 3-40%. The vapor-deposited material 11 is formed in a spherical shape of the diameter of 5-30 mm, or in a disk shape of the diameter of 3-20 mm and the height of 1-10 mm. COPYRIGHT: (C)2005,JPO&NCIPI
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