SLIT-COAT TYPE COATING APPARATUS AND SLIT-COAT TYPE COATING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a slit-coat type coating apparatus and a slit-coat type coating method by which the manufacturing process is simplified and the manufacturing cost is reduced.

SOLUTION: The slit-coat type coating apparatus 10 possesses a holding table 20 for holding a substrate 1 provided with a through hole 2 penetrating in the thickness direction and a coating head 40 to face a coating surface 1a opposed to the holding surface 1b of the substrate 1 which is held by the holding table 20 and provided with a slit like nozzle opening 41 through which a liquid 3 flows out and is operated by moving relatively the substrate 1 and the coating head 40 in the plane direction and applying the liquid 3 on the coating surface 1a of the substrate 1. A blowing means 80 for blowing a gas toward the coating surface 1a side from the holding surface 1b side is provided in the through hole 2 of the substrate 1.

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