VOLTAGE SUPPLY PARAMETER MEASUREMENT DEVICE IN WAFER BURN-IN SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a voltage supply parameter measurement device of a wafer burn-in system capable of measuring voltage supply parameters to more DUTs simultaneously by a single test process. SOLUTION: A voltage supply parameter measurement device of a wafer burn-in system by this invention is provided with: an FPGA for generating control signals including the driving voltage for measuring voltage supply parameters; a D/A conversion part for converting digital control signals supplied from the FPGA into analog control signals to output them; and a voltage supply circuit part comprising n same circuit blocks connected with n DUTs at a one-to-one ratio and provided with photo MOSs at the output terminals of each of the n circuit blocks to selectively switch on/off the photo MOS of each circuit block and selectively transmit the control signals supplied from the D/A conversion part to the respective DUTs. COPYRIGHT: (C)2005,JPO&NCIPI