| 摘要 |
PROBLEM TO BE SOLVED: To provide a device and a method that allows a process of removing an unwanted substance of a resist or the like from an object to be processed to be more effectively, easily and reliably conducted in a short period of time. SOLUTION: An object processing device for conducting a process of removing the unwanted substance on a face to be processed of an object comprises a means for arranging the object in the object processing device; a control means for setting a predetermined temperature, humidity and pressure in the object processing device; a cooling means for cooling the arranged object by a cooling substance in the object processing device; a first process means for promoting to permeate moisture into the unwanted substance on the face to be processed by placing the face to be processed of the object under the atmosphere of a predetermined heating, humidification and pressure; a second process means for promoting to remove the unwanted substance on the face to be processed by water pressurization, and a supplying means which supplies either warm water or water mist to the face to be processed of the object under normal pressure or reduced pressure, or supplies it together with an inactive gas; and a third process means for drying the object to be processed by a means for supplying the inactive gas in a normal temperature or heated to the face to be processed of the object. COPYRIGHT: (C)2005,JPO&NCIPI
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