| 摘要 |
PROBLEM TO BE SOLVED: To share an oscillator in flow rate measurement and bubble detection regarding an integration system capable of measuring the speed of fluid (flow rate) flowing in a tube and detecting bubbles in the fluid. SOLUTION: By utilizing a resonance of a radial directional oscillation or a lateral oscillation of the oscillators 14u, 14d, an axial directional plate wave is made to generate in a tube 12. By utilizing the resonance of the radial directional oscillation or the lateral oscillation, the oscillators 14u, 14d are made smaller than the case utilizing a thickness directional oscillation or a lateral oscillation. The oscillators 14au, 14ad for detecting bubbles are provided at the positions opposite to the oscillators 14u, 14d across the tube 12. COPYRIGHT: (C)2005,JPO&NCIPI
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