| 摘要 |
PROBLEM TO BE SOLVED: To provide a height inspection device for detecting the height information of a specimen and the difference of the material of the specimen as well. SOLUTION: The height inspection device 1 for measuring the height of the specimen 13 using the output of an imager 11 comprises a light source 4 irradiating light beam including a light of at least two specific wavelengths, a confocus disk 8 having a confocus pin hole 8a where the light beam emitted out of the light source 4 passes, the first image focusing optical system 7 positioning on the specimen 13 side of the confocus pin hole 8a and focusing the image of the confocus pin hole 8a on the specimen 13, an imager 11, and the second image focusing optical system 10 positioning on the imager 11 side of the confocus pin hole 8a side and focusing on the image surface M of the imager 11, the reflection image of the confocus pin hole 8a reflected by the specimen 13 and focused on the confocus disk 8 by the first focusing optical system 7 having passed the confocus pin hole 8a. The device is constituted so that the imager 11 detects separately each specific wavelength of light included in the reflection image and detects the difference of the material of the specimen 13 using the output of the imager 11. COPYRIGHT: (C)2005,JPO&NCIPI
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