| 摘要 |
PROBLEM TO BE SOLVED: To provide a defect evaluation method for laminated ceramic element, capable of precisely evaluating the size of a defect present within a laminate ceramic element, and to provide a production process for laminated ceramic element component which uses the method. SOLUTION: The defect evaluation method for the laminated ceramic element 5, including a ceramic layer 1 and a conductor layer 3 alternately laminated, comprises emitting high-frequency waves from a probe 9 to the defect 7 present within the ceramic element 5, and evaluating the size of the defect 7 from the magnitude of an echo signal measured by detection of a high-frequency reflected wave 13 of. The frequency of the high-frequency wave emitted from the probe 9 is set to 50 MHz or higher, and the probe 9 is provided in parallel to the conductor layer 3. COPYRIGHT: (C)2005,JPO&NCIPI
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