| 摘要 |
PROBLEM TO BE SOLVED: To increase the delivery pressure of a diaphragm pump used in a micro pump or the like. SOLUTION: A casing 38 and a diaphragm 40 are constituted of a substrate 12 and a processed plate 14 formed with a recessed portion 16 at a jointed surface to the substrate. A drive member 42 including a piezoelectric element 32 drives the diaphragm 40. The piezoelectric element 32 of the drive member 42 is fixed on the casing 38 therearound without use of a flexible member and drives the diaphragm 40 with the fixing position as a fulcrum thereof. Thus, deformation of the piezoelectric element 32 can be completely transmitted to the diaphragm 40 to increase pump delivery pressure. COPYRIGHT: (C)2005,JPO&NCIPI
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