the vaccum chuck,申请号KR20050009691U-传众专利搜索

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发明名称	the vaccum chuck
摘要
申请公布号	KR200389384(Y1)	申请公布日期	2005.07.14
申请号	KR20050009691U	申请日期	2005.04.08
申请人		发明人
分类号	H01L21/68;(IPC1-7):H01L21/68	主分类号	H01L21/68
代理机构		代理人
主权项
地址

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