Apparatus and method for detecting tilt and vibration of a body

摘要

Tilt and vibration sensor and method for forming the sensor with a piezoresistive membrane (10) having a weight (16) affixed proximate its center for detecting the tilt and vibration of a body. The membrane (10) may include four piezoresistors (12, 14) placed proximate the edges (20, 22) of the membrane (10) at the points of maximum stress when the membrane (10) is subject to a uniform applied pressure. The piezoresistors (12, 14) may form a Wheatstone bridge circuit to generate a first (34) and second output voltage (36) in response to changes in resistance of the piezoresistors (12, 14) under the uniform applied pressure. The first output voltage (34) may be indicative of the angle of inclination of a body and the second output voltage (36) may be indicative of the vibration of the body. The membrane (10) may be fabricated from a silicon wafer using known photolithography and etching processes. The membrane (10) maybe connected with a voltage source and secured within an appropriate housing to be placed in an operational environment.