Method for manufacturing moulded micromechanical structures

摘要

A method for manufacturing refractive microlenses (60) and other three-dimensional micromechanical structures having desired properties. At least one first micromechanical structure (36) is formed by dispensing a first material (24) onto a surface (16) of a first substrate (12), a mold (42) is prepared using the at least one first micromechanical structure (36), and at least one second micromechanical structure (60) of a second material (54) is molded on a surface of a second substrate (50) using the mold (42). The at least one first micromechanical structure (36) is formed of a material (24) that is suitable to the procedure by which it is dispensed, and the at least one second micromechanical structure (60) is formed of a material (54) that provides desired properties. <IMAGE>