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发明名称
Polishing method
摘要
申请公布号
EP1308243(B1)
申请公布日期
2005.07.13
申请号
EP20020025724
申请日期
1995.09.13
申请人
HITACHI, LTD.
发明人
MORIYAMA, SHIGEO;YAMAGUCHI, KATSUHIKO;HOMMA, YOSHIO;MATSUBARA, SUNAO;ISHIDA, YOSHIHIRO;KAWA-AI, RYOUSEI
分类号
B24B37/04;B24D3/32;B24D13/14;(IPC1-7):B24B37/04
主分类号
B24B37/04
代理机构
代理人
主权项
地址
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