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发明名称
摘要
申请公布号
JP3671504(B2)
申请公布日期
2005.07.13
申请号
JP19960047740
申请日期
1996.03.05
申请人
发明人
分类号
H01L21/822;G06F17/50;H01L21/82;H01L27/04;(IPC1-7):H01L21/82
主分类号
H01L21/822
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